DIY MEMS : Fabricating Microelectromechanical Systems in Open Use Labs (9783030330729)

This book describes the future of microscopically small medical devices and how to locate a lab to start conducting your own do-it-yourself microelectromechanical systems (MEMS) research in one of the many national, international, government, and other regional open use facilities, where you can quickly begin designing and fabricating devices for your applications. You will learn specific, tangible information on what MEMS are and how a device is fabricated, including what the main types of equipment are in these facilities. The book provides advice on working in a cleanroom, soft materials, collaboration, intellectual property and privacy issues, regulatory compliance, and how to navigate other issues that may arise. This book is primarily aimed at researchers and students who work at universities without MEMS facilities, and small companies who need access to MEMS resources.

Product details

• Format Hardback | 188 pages
• Dimensions 155 x 235 x 12.7mm | 477g
• Publication date 06 Dec 2019
• Publisher Springer Nature Switzerland AG
• Publication City/Country Cham, Switzerland
• Language English
• Edition Statement 1st ed. 2019
• Illustrations note 4 Illustrations, color; 15 Illustrations, black and white; XVI, 188 p. 19 illus., 4 illus. in color.
• ISBN10 3030330729
• ISBN13 9783030330729

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